Page 80 - Praxair - Specialty Gases and Equipment Solutions

SiHCI 3
Trichlorosilane

Transportation (M)SDS Reference
Information P-4823
UN Number: 1295 CAS Number
United States of America Canada Mexico
Shipping Name Trichlorosilane Trichlorosilane Trichlorosilane 10025 - 78 - 2
Hazard Class 4.3 (3) (8) 4.3 (3) (8) 4.3 General Description
Label Dangerous Dangerous Dangerous Colorless, corrosive, flammable liquid
When Wet, When Wet, When Wet, with an irritating, choking odor.
Flammable Liquid, Flammable Liquid, Flammable Liquid,
Corrosive Corrosive Corrosive

Product/ Purity Part Cylinder Boron Carbon Donor Other Resistivity
Grade Number (As + P) Chlorosilanes
Semiconductor, 99.95% TC 3.5SP ST55, 0.12 5 .08 500 >/= 300
3.5 ST10 ppb/a ppm/a ppb/a ppm/w ohm-cm
Semiconductor, 99.9% TC 3.0SP ST55, 0.12 5 1.5 1000 >/= 200
3.0 ST10 ppb/a ppm/a ppb/a ppm/w ohm-cm
Concentrations given are ppm by volume unless otherwise specified.
Maximum ppm unless otherwise noted.

Cylinders

Cylinder Style Size Connection Pressure Volume Gross Weight
Type in (cm) CGA/DISS psig (bar) lb (kg) lb (kg) Section B – Pure Gases
ST55 Low Pressure Drum 46 x 24 (116.84 x 60.96) Based on 2.0 (0.13) 550 (249.5) 800 (363)
application
ST10 Low Pressure Drum 30 x 12 (76.2 x 30.48) Based on 2.0 (0.13) 90 (40.8) 140 (64)
application

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about equipment recommendations
for Trichlorosilane.

1-877-PRAXAIR www.praxairdirect.com B•79