Page 81 - Praxair - Specialty Gases and Equipment Solutions

WF 6
Tungsten Hexafluoride

Transportation (M)SDS Reference
Information P-4855-D
UN Number: 2196 CAS Number
United States of America Canada Mexico
Shipping Name Tungsten Tungsten Tungsten 7783 - 82 - 6
Hexafluoride Hexafluoride Hexafluoride General Description
Hazard Class 2.3 (8) 2.3 (8) 2.3 (8) Colorless, toxic, nonflammable, corrosive,
Label Toxic Gas, Toxic Gas, Toxic Gas, liquefied gas.
Corrosive Corrosive Corrosive

Product/ Purity Cylinder HF O 2 /Ar N 2 CO CF 4 CO 2 SF 6 SiF 4 Total
Grade Metals
Semiconductor, 99.9995% K, Q 1 0.5 0.5 0.5 0.5 0.5 0.5 0.5 300
5.5 ppb/wt
Concentrations given are ppm by volume unless otherwise specified.
Maximum ppm unless otherwise noted.

Cylinders
Cylinder Style Size Connection Pressure Volume Gross Weight
Type in (cm) CGA/DISS psig (bar) lb (kg) lb (kg)
K High Pressure Steel 51 x 9 (129.5 x 22.9) 670/638 2.6 (0.18) 110 (50) 230 (104)
Q High Pressure Steel 31 x 7 (78.74 x 17.78) 670/638 2.6 (0.18) 44 (20) 109 (49)

Equipment Recommendations

Section B – Pure Gases

UltraPurge 400 Gas Cabinet Series
™
(see page E •306)

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