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SiH            4
            Silane





            Transportation                                                      (M)SDS Reference
            Information                                                         P-4649
            UN Number: 2203                                                     CAS Number
                                  United States of America  Canada  Mexico
            Shipping Name        Silane         Silane,       Silane            7803 - 62 - 5
                                                Compressed                      General Description
            Hazard Class         2.1            2.1           2.1               Colorless, pyrophoric, flammable gas
            Label                Flammable Gas   Flammable Gas   Flammable Gas  with a repulsive odor.




              Product/     Purity     Part     Cylinder   Ar    O 2   CO 2  CO    Total         He   Disilane
              Grade                   Number                                      Chlorosilanes
              Semiconductor,    99.9999%   SI  6.0SP   K   0.05   0.06   0.05   0.05   0.15     1    0.5
              6.0
              Semiconductor,   99.997%   SI  4.7SP   K   1     0.1   0.5    0.5   0.5           5    –
              4.7
              Concentrations given are ppm by volume unless otherwise specified.
              Maximum ppm unless otherwise noted.





              Product/     Purity    Part     Cylinder  H 2    CH 4  N 2  H 2 O  Disiloxane  Methylsilane  Resistivity
              Grade                  Number
              Semiconductor,    99.9999%   SI  6.0SP   K   20    0.05   1   0.5   0.5   0.5         >/= 10000
              6.0                                                                                   ohm-cm
              Semiconductor,   99.997%   SI  4.7SP   K   100    0.5   5   2   –        –            >/= 7500
              4.7                                                                                   ohm-cm
              Concentrations given are ppm by volume unless otherwise specified.
              Maximum ppm unless otherwise noted.
                 C 2 , C 3 , C 4  = C 2 H 6 ; C 3 H 8 ; C 4 H 10 .
              (1)

     Section B – Pure Gases
              Semiconductor (from polysilicon deposited silane)
                                                                                i
              Component     Specification      Specification
                            Semiconductor 6.0   Semiconductor 4.7               Due to code regulations full
              C             0.2 ppm/a          0.4 ppm/a                        containment within a gas cabinet
              P             20 ppt/a           100 ppt/a                        is required for Silane.
              B             20 ppt/a           40 ppt/a
              As            5 ppt/a            20 ppt/a                         See our complete line of gas
              Al            5 ppt/a            20 ppt/a                         cabinets, process panels, and
              Ga, Sb, In    5 ppt/a each       20 ppt/a each                    controllers (pages E•304 - E•309).
              Fe + Cr + Ni +   1 ppb/a         –
              Cu + Zn





              Cylinders

              Cylinder   Style            Size              Connection   Pressure    Volume   Gross Weight
              Type                        in (cm)           CGA/DISS     psig (bar)   lb (kg)   lb (kg)
              K         High Pressure Steel   51 x 9 (129.5 x 22.9)   350/632   1040 (72)   22 (10)   155 (70)
              K         High Pressure Steel   51 x 9 (129.5 x 22.9)   350/632   1040 (72)   11 (5)   144 (65)




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