Page 29 - Praxair - Specialty Gases and Equipment Solutions

Isotopically Enriched 11

BF 3 B F 3

Transportation (M)SDS Reference
Information P-4820-C
UN Number: 1008 CAS Number
United States of America Canada Mexico
Shipping Name Boron Boron Boron 20654 - 88 - 0
Trifluoride Trifluoride Trifluoride General Description
Hazard Class 2.3 (8) 2.3 (8) 2.3 (8) Colorless, toxic, corrosive, nonflammable
Label Toxic Gas, Toxic Gas, Toxic Gas, gas with a pungent odor.
Corrosive Corrosive Corrosive

Product/Grade Purity Cylinder Isotopic N 2 Ar O 2 CO 2 HF SO 2
Enrichment
Semiconductor, 99.9% L4, ELB, 99.7% 25 25 25 25 25 25
3.0 UpTime ®
Concentrations given are ppm by volume unless otherwise specified.
Maximum ppm unless otherwise noted.

Cylinders
Cylinder Style Size Connection Pressure Volume Gross Weight
Type in (cm) CGA/DISS psig (bar) gr (kg) lb (kg)
L4 High Pressure Steel 14 x 4.2 (35.5 x 10.6) 330/642 675 (46.5) 400 (0.4) 11 (5)
ELB High Pressure Steel 16 x 2 (40.6 x 5) 330/642 700 (48.3) 80 6 (3)
UpTime Sub-Atmospheric See page D •146 for all sub-atmospheric ion implant packaging.

Equipment Recommendations

Section B – Pure Gases

i

See Section D for additional information
on Praxair’s Semiconductor product
line (pages D•143 - D•148).
See our complete line of gas delivery
systems in Section E, including
gas cabinets, process panels, and
controllers.
UpTime Sub-Atmospheric packaging
(see page D •146)

B•28 1-877-PRAXAIR www.praxairdirect.com